QI DUAN; EMILIA LAHTI. A Unified MEMS-Based Micro-Sensing Platform for Smart Electronics and Biomedical Monitoring: Design, Fabrication, and Experimental Validation. ECCSUBMIT Conferences, [S. l.], v. 2, n. 2, p. 84–94, 2024. Disponível em: https://eccsubmit.com/index.php/congress/article/view/40. Acesso em: 19 jul. 2025.